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PECVD system Ultradep 3000
Manufacturer: GSI | Category:Semiconductor Manufacturing | List Price: $86,250.00
 
 
 
The Ultradep 3000 casette-to-cassette load-lock PECVD system produces high quality plasma enhanced CVD films on a wide range of substrate materials, shapes and sizes (up to 8” dia. as well as non-round substrates) at reduced temperatures.  This tool ideally suited for a variety of deposition applications including MEMS fabs, universities, R&D environments, production feasibility testing and as a backup to complex multi-chamber systems.

The system is configured for depositing controlled stress (dual frequency generators included) oxide, oxy-nitride and nitride films and includes a susceptor designed to hold three 4” diameter wafers.
 
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OptiSales sells high-quality used equipment to the Optoelectronics, Semiconductor, and MEMS Industries. Metrology equipment featuring AFM, Alpha Step, Auto EL ellipsometer, cd measurement, coating thickness monitor, film mapping, interferometer, leak detector, metallographic and inspection microscope, particle counter, RGA, shear test, spectrophotometer, stress measurement, and wafer mapping tools. Optoelectronics tools include Newport Autoalign, Ultralign, OSA, laser, wdm test, wdm source, optical power meter, and die bonder equipment. Semiconductor and MEMS tools include: aligner, bonder, coater, cleaver, cryopump, CVD, deposition, dicing saw, die attach, die bonder, e beam, etch, evaporation, fab, furnace, ICP, LPCVD, mask aligner, PECVD, plasma etcher, plasma asher, prober, profilometer, RIE, scribe break, spin rinse dryer, spinner, turbo pump, and other tools for vacuum and thin film processing. Manufacturers represented: Agilent, Airco Temescal, Alcatel, Allessi, Anatech, Applied Materials, Balzers, Beuhler, Branson, Bruce, Carl Zeiss, Coherent, CVC, Denton, Disco, Drytek, Dynatex, Ecomet, Edwards, Electrotech, EMI, Fibrpol, Filmtek, FSI, Gaertner, HP, Hewlett Packard, ILX Lightwave, Jeol, Karl Suss, Keithley, Kulike & Soffa, K&S, Lapmaster, LAM, Leybold, Leybold-Heraeus, Matrix, Melles Griot, Micro Automation, MRC, Nanometrics, Nanospec, Newport, Novellus, Perkin Elmer, Plasma Therm, Rudolph, Spectra Physics, Semifab, Semitool, Shinkawa, Sloan, Solitec, SPI, STC, Suss, SVG, Tamarack, Technics, Tegal, Teledyne, Teledyne TAC, Temescal, Tencor, Thermco, Toray, Ultratech, Unaxis, Unitek, Varian, Veeco, Westbond, Wyko, Zeiss, Zygo