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Auto EL IV Ellipsometer
Manufacturer: Rudolph | Category:Semiconductor Metrology and Inspection | List Price: $19,500.00
 
 
 
Multi-Wavelength Ellipsometer uses light at 3 different wavelengths.     Excellent condition - used lightly in a government QC lab.     Automatic sample stage accomidates samples or wafers up to 6": movement can be pre-programmed or controlled via joystick .     Will automatically measure, display and print 1 or multiple points on a substrate and print measured values, averages, etc.     Easily replaced tungsten halogen lamp with interference filter configuration for 633, 576, 405nm measurements.     Includes Micro-spot optics to allow measurements in areas smaller than 50um.      Digital video and monitor of measurement region.     SECSII Interface for computer control.     Built in Printer. 
Integrated software makes measuring n, k, and t for single and multilayer films easy.       Manual included.     Unit is tested using Rudolph oxide standard and guaranteed operational.
 
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OptiSales sells high-quality used equipment to the Optoelectronics, Semiconductor, and MEMS Industries. Metrology equipment featuring AFM, Alpha Step, Auto EL ellipsometer, cd measurement, coating thickness monitor, film mapping, interferometer, leak detector, metallographic and inspection microscope, particle counter, RGA, shear test, spectrophotometer, stress measurement, and wafer mapping tools. Optoelectronics tools include Newport Autoalign, Ultralign, OSA, laser, wdm test, wdm source, optical power meter, and die bonder equipment. Semiconductor and MEMS tools include: aligner, bonder, coater, cleaver, cryopump, CVD, deposition, dicing saw, die attach, die bonder, e beam, etch, evaporation, fab, furnace, ICP, LPCVD, mask aligner, PECVD, plasma etcher, plasma asher, prober, profilometer, RIE, scribe break, spin rinse dryer, spinner, turbo pump, and other tools for vacuum and thin film processing. Manufacturers represented: Agilent, Airco Temescal, Alcatel, Allessi, Anatech, Applied Materials, Balzers, Beuhler, Branson, Bruce, Carl Zeiss, Coherent, CVC, Denton, Disco, Drytek, Dynatex, Ecomet, Edwards, Electrotech, EMI, Fibrpol, Filmtek, FSI, Gaertner, HP, Hewlett Packard, ILX Lightwave, Jeol, Karl Suss, Keithley, Kulike & Soffa, K&S, Lapmaster, LAM, Leybold, Leybold-Heraeus, Matrix, Melles Griot, Micro Automation, MRC, Nanometrics, Nanospec, Newport, Novellus, Perkin Elmer, Plasma Therm, Rudolph, Spectra Physics, Semifab, Semitool, Shinkawa, Sloan, Solitec, SPI, STC, Suss, SVG, Tamarack, Technics, Tegal, Teledyne, Teledyne TAC, Temescal, Tencor, Thermco, Toray, Ultratech, Unaxis, Unitek, Varian, Veeco, Westbond, Wyko, Zeiss, Zygo