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ECR PECVD System
Manufacturer: Microscience | Category:Semiconductor Manufacturing | List Price: $29,500.00
 
 
 
ECR PECVD System Microscience 9200 with loadlocked 24" chamber and more than 30 ports.  Complete with:  (2) Sorensen DCR7-300B power Supplies,  Huttinger IGM1 / 2450L,  Spectra VASCAN Plus, ENI Matchwork Control Unit,  MKS Vacuum guage measurement and control system Type 146 (4channels), MKS Type 232 RS-232 Interface, VAT Valve Controller, (2) MKS 247C 4-channel readouts,    Microscience programmable control, Microscience Gas Panel 9005, Advanced Energy RFX-600 Reflected Power unit, Advanced Energy ATX-600 Forward Power unit.    MANY MORE DETAILS, Click on "Contact Us".
 
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OptiSales sells high-quality used equipment to the Optoelectronics, Semiconductor, and MEMS Industries. Metrology equipment featuring AFM, Alpha Step, Auto EL ellipsometer, cd measurement, coating thickness monitor, film mapping, interferometer, leak detector, metallographic and inspection microscope, particle counter, RGA, shear test, spectrophotometer, stress measurement, and wafer mapping tools. Optoelectronics tools include Newport Autoalign, Ultralign, OSA, laser, wdm test, wdm source, optical power meter, and die bonder equipment. Semiconductor and MEMS tools include: aligner, bonder, coater, cleaver, cryopump, CVD, deposition, dicing saw, die attach, die bonder, e beam, etch, evaporation, fab, furnace, ICP, LPCVD, mask aligner, PECVD, plasma etcher, plasma asher, prober, profilometer, RIE, scribe break, spin rinse dryer, spinner, turbo pump, and other tools for vacuum and thin film processing. Manufacturers represented: Agilent, Airco Temescal, Alcatel, Allessi, Anatech, Applied Materials, Balzers, Beuhler, Branson, Bruce, Carl Zeiss, Coherent, CVC, Denton, Disco, Drytek, Dynatex, Ecomet, Edwards, Electrotech, EMI, Fibrpol, Filmtek, FSI, Gaertner, HP, Hewlett Packard, ILX Lightwave, Jeol, Karl Suss, Keithley, Kulike & Soffa, K&S, Lapmaster, LAM, Leybold, Leybold-Heraeus, Matrix, Melles Griot, Micro Automation, MRC, Nanometrics, Nanospec, Newport, Novellus, Perkin Elmer, Plasma Therm, Rudolph, Spectra Physics, Semifab, Semitool, Shinkawa, Sloan, Solitec, SPI, STC, Suss, SVG, Tamarack, Technics, Tegal, Teledyne, Teledyne TAC, Temescal, Tencor, Thermco, Toray, Ultratech, Unaxis, Unitek, Varian, Veeco, Westbond, Wyko, Zeiss, Zygo